Substrate used in a method and apparatus for...

Details Substrate used in a method and apparatus for... Substrate used in a method and apparatus for...

2011-01-20

2011-11-22

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

Reexamination Certificate

active

08064056

ABSTRACT:
A substrate includes an overlay target. The overlay target can include two superposed layers. Each of the two superposed layers includes two gratings with a different pitch from each other.

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