Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2005-10-24
2011-10-04
Meeks, Timothy (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
Reexamination Certificate
active
08029858
ABSTRACT:
The invention includes methods of forming material on a substrate and methods of forming a field effect transistor gate oxide. In one implementation, a first species monolayer is chemisorbed onto a substrate within a chamber from a gaseous first precursor. The first species monolayer is discontinuously formed over the substrate. The substrate having the discontinuous first species monolayer is exposed to a gaseous second precursor different from the first precursor effective to react with the first species to form a second species monolayer, and effective to form a reaction product of the second precursor with substrate material not covered by the first species monolayer. The substrate having the second species monolayer and the reaction product is exposed to a third gaseous substance different from the first and second precursors effective to selectively remove the reaction product from the substrate relative to the second species monolayer. Other implementations are contemplated.
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Meeks Timothy
Micro)n Technology, Inc.
Miller, Jr. Joseph
Wells St. John P.S.
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