Operating a plasma process

Details Operating a plasma process Operating a plasma process

2009-05-26

2011-10-25

Owens, Douglas W (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C204S298080, C204S298060, C204S192150

Reexamination Certificate

active

08044595

ABSTRACT:
A method for operating one or more plasma processes in a plasma chamber, with at least two power supplies, the method comprising the following process steps:a. carrying out an arc detection for at least one of the power supplies;b. generating at least one signal relating to the arc detection and/or data relating to the arc detection;transferring the at least one signal and/or the data to a plasma process-regulating device and/or to one or more other power supplies or to one or more of the arc diverter devices associated with the other power supplies.

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