Semiconductor device with a gate having a bulbous area and a...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S288000, C257S330000

Reexamination Certificate

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08030715

ABSTRACT:
A semiconductor device with a gate having a bulbous area and a flattened area underneath the bulbous are is presented. The semiconductor device includes a semiconductor substrate, an isolation layer, a gate insulation layer, and gates. The semiconductor substrate has recess parts that have first grooves which have bulbous-shaped profiles and second vertically flattened profile grooves which extend downward from the first grooves. The gates are formed in the recess parts in which the gate insulation layer is double layered in the bulbous profile areas and is single layered in the flattened profile areas.

REFERENCES:
patent: 5506432 (1996-04-01), Kurusu
patent: 7541656 (2009-06-01), Kim et al.
patent: 2006-097432 (2006-04-01), None
patent: 2006-112218 (2006-04-01), None
patent: 1020040054248 (2004-06-01), None
patent: 1020090001392 (2009-01-01), None
Derwent 12421320, Jan. 2004, Korean, Kim.

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