Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2009-04-09
2011-10-04
Pham, Long (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S288000, C257S330000
Reexamination Certificate
active
08030715
ABSTRACT:
A semiconductor device with a gate having a bulbous area and a flattened area underneath the bulbous are is presented. The semiconductor device includes a semiconductor substrate, an isolation layer, a gate insulation layer, and gates. The semiconductor substrate has recess parts that have first grooves which have bulbous-shaped profiles and second vertically flattened profile grooves which extend downward from the first grooves. The gates are formed in the recess parts in which the gate insulation layer is double layered in the bulbous profile areas and is single layered in the flattened profile areas.
REFERENCES:
patent: 5506432 (1996-04-01), Kurusu
patent: 7541656 (2009-06-01), Kim et al.
patent: 2006-097432 (2006-04-01), None
patent: 2006-112218 (2006-04-01), None
patent: 1020040054248 (2004-06-01), None
patent: 1020090001392 (2009-01-01), None
Derwent 12421320, Jan. 2004, Korean, Kim.
Hynix / Semiconductor Inc.
Ladas & Parry LLP
Pham Long
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