Supports: racks – Special article – Platelike
Reexamination Certificate
2008-09-12
2011-10-11
Novosad, Jennifer E. (Department: 3637)
Supports: racks
Special article
Platelike
Reexamination Certificate
active
08033401
ABSTRACT:
A wafer guide for preventing a wafer breakage in a semiconductor cleaning apparatus includes a lower supporter, side supporters, fixing units and stoppers. The lower supporter is provided with a plurality of slots formed with the same interval in a length direction to vertically stand a plurality of wafers thereon. The side supporters are structured and arranged in parallel at each side above the lower supporter. The side supporters support side end parts of the wafers. The fixing units are adapted to support both end parts of the lower supporter and the side supporters, and may be fixed to a bath. The stoppers are individually coupled to each of the fixing units. The stoppers are operable to generate an error in a close operation of holder units of the robot chuck when the robot chuck deviates from a normal alignment range, so as not to perform a wafer chucking, thereby preventing a wafer breakage during the wafer chucking.
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Han Kang-Hee
Jun Yong-Myung
Lee Hea-Woong
Ryu Chang-Gil
Yoon Byoung-Moon
Novosad Jennifer E.
Samsung Electronics Co,. Ltd.
Stanzione & Kim LLP
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