Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-10-25
2011-10-18
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
Reexamination Certificate
active
08040489
ABSTRACT:
A substrate processing method which includes an exposure step wherein an immersion area of a first liquid is formed on a substrate and the substrate is exposed by being irradiated with an exposure light through the first liquid, and an immersion step wherein the substrate is immersed in a second liquid before the exposure step. By this method, occurrences of problems caused by adhesion marks, which are always involved in immersion exposure, can be reduced.
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Fujiwara Tomoharu
Mizutani Takeyuki
Nakano Katsushi
Okumura Masahiko
Sugihara Tarou
Kim Peter B
Liu Chia-how Michael
Nikon Corporation
Oliff & Berridg,e PLC
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