Microstructure, semiconductor device, and manufacturing...

Details Microstructure, semiconductor device, and manufacturing... Microstructure, semiconductor device, and manufacturing...

2007-03-02

2010-06-22

Smith, Zandra (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S415000, C257SE27001, C438S052000, C438S053000

Reexamination Certificate

active

07741687

ABSTRACT:
A microstructure includes a first structural layer and a second structural layer which faces the first structural layer with a space interposed therebetween and is partially fixed to the first structural layer. At least one of the first structural layer and the second structural layer can be displaced. Further, opposed surfaces of the first structural layer and the second structural layer are different in roughness.

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Office Action (Chinese Patent Application No. 200710086232.3) dated Feb. 5, 2010 with full English translation.

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