Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2007-11-29
2010-11-16
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S154000, C438S157000, C438S158000, C257SE21412
Reexamination Certificate
active
07833851
ABSTRACT:
It is an object of the invention that, in semiconductor device, in order to promote the tendency of miniaturization of each display pixel pitch, which will be resulted in with the tendency toward the higher precision (increase of pixel number) and further miniaturizations, a plurality of elements is formed within a limited area and the area occupied by the elements is compacted so as to be integrated. A plurality of semiconductor layers13, 15is formed on different layers with insulating film14sandwiched therebetween. After carrying out crystallization by means of laser beam, on each semiconductor layer (semiconductor layers16, 17having crystal structure respectively), an N-channel type TFT of inversed stagger structure and a P-channel type TFT30of top gate structure are formed respectively and integrated so that the size of CMOS circuit is miniaturized.
REFERENCES:
patent: 4599133 (1986-07-01), Miyao et al.
patent: 4692994 (1987-09-01), Moniwa et al.
patent: 4959697 (1990-09-01), Shier et al.
patent: 4999682 (1991-03-01), Xu et al.
patent: 5028976 (1991-07-01), Ozaki et al.
patent: 5095347 (1992-03-01), Kirsch
patent: 5210437 (1993-05-01), Sawada et al.
patent: 5266507 (1993-11-01), Wu
patent: 5355022 (1994-10-01), Sugahara et al.
patent: 5489792 (1996-02-01), Hu et al.
patent: 5504376 (1996-04-01), Sugahara et al.
patent: 5548147 (1996-08-01), Mei
patent: 5563440 (1996-10-01), Yamazaki et al.
patent: 5604137 (1997-02-01), Yamazaki et al.
patent: 5619044 (1997-04-01), Makita et al.
patent: 5644147 (1997-07-01), Yamazaki et al.
patent: 5773340 (1998-06-01), Kumauchi et al.
patent: 5781445 (1998-07-01), Shiue et al.
patent: 5807771 (1998-09-01), Vu et al.
patent: 5807772 (1998-09-01), Takemura
patent: 5818070 (1998-10-01), Yamazaki et al.
patent: 5894137 (1999-04-01), Yamazaki et al.
patent: 5917221 (1999-06-01), Takemura
patent: 6066516 (2000-05-01), Miyasaka
patent: 6111296 (2000-08-01), Yamazaki et al.
patent: 6121660 (2000-09-01), Yamazaki et al.
patent: 6127702 (2000-10-01), Yamazaki et al.
patent: 6184556 (2001-02-01), Yamazaki et al.
patent: 6191442 (2001-02-01), Matsufusa
patent: 6215130 (2001-04-01), Dodabalapur
patent: 6218714 (2001-04-01), Yamazaki
patent: 6320213 (2001-11-01), Kirlin et al.
patent: 6340830 (2002-01-01), Takemura
patent: 6528852 (2003-03-01), Takemura
patent: 6537864 (2003-03-01), Aya et al.
patent: 6602765 (2003-08-01), Jiroku et al.
patent: 6639246 (2003-10-01), Honda
patent: 6680223 (2004-01-01), Yamazaki et al.
patent: 6740938 (2004-05-01), Tsunoda et al.
patent: 6815772 (2004-11-01), Takemura
patent: 6841434 (2005-01-01), Miyairi et al.
patent: 6924528 (2005-08-01), Yamazaki et al.
patent: 6982194 (2006-01-01), Tsunoda et al.
patent: 7230601 (2007-06-01), Yamazaki et al.
patent: 2001/0003659 (2001-06-01), Aya et al.
patent: 2003/0015703 (2003-01-01), Yamazaki et al.
patent: 2003/0025166 (2003-02-01), Yamazaki et al.
patent: 2003/0075733 (2003-04-01), Yamazaki et al.
patent: 2004/0056253 (2004-03-01), Honda
patent: 0 199 388 (1986-10-01), None
patent: 0 506 089 (1992-09-01), None
patent: 0 553 774 (1993-08-01), None
patent: 61-222254 (1986-10-01), None
patent: 61-226916 (1986-10-01), None
patent: 04-068565 (1992-03-01), None
patent: 05-198739 (1993-08-01), None
patent: 05-206422 (1993-08-01), None
patent: 05-257169 (1993-10-01), None
patent: 05-335482 (1993-12-01), None
patent: 08-102501 (1996-04-01), None
patent: 10-93099 (1998-04-01), None
patent: 10-93100 (1998-04-01), None
patent: 10-150202 (1998-06-01), None
patent: 10-270359 (1998-10-01), None
patent: 11-40772 (1999-02-01), None
patent: 2000-505241 (2000-04-01), None
patent: 2001-189458 (2001-07-01), None
patent: WO 88/03328 (1988-05-01), None
patent: WO 97/45827 (1997-12-01), None
Kuwabara Hideaki
Tanaka Koichiro
Ghyka Alexander G
Nikmanesh Seahvosh J
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
LandOfFree
Semiconductor device and manufacturing method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor device and manufacturing method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device and manufacturing method thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4248296