Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-03-21
2010-11-23
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S492100, C250S492220, C430S005000, C438S707000, C438S774000, C356S392000, C356S393000, C356S394000
Reexamination Certificate
active
07838831
ABSTRACT:
A substrate inspection method includes forming a conductive thin film on a surface of an inspection target substrate with a pattern formed thereon, generating an electron beam and irradiating the substrate having the thin film formed thereon with the electron beam, detecting at least any of secondary electrons, reflected electrons and backscattered electrons released from the surface of the substrate and outputting signals constituting an inspection image, and selecting at least any of a material, a film thickness and a configuration for the thin film, or at least any of a material, a film thickness and a configuration for the thin film and an irradiation condition with the electron beam according to an arbitrary inspection image characteristic so that an inspection image according to an inspection purpose can be obtained.
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K. Tsuno, “Simulation of a Wien filter as beam separator in a low energy electron microscope,” Ultramicroscopy 55 (1994), pp. 127-140.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Vanore David A
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