Semiconductor device and method of forming the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S374000, C257S381000, C257SE21197

Reexamination Certificate

active

07737505

ABSTRACT:
A semiconductor device may include, but is not limited to, a single crystal silicon diffusion layer, a polycrystal silicon conductor, and a diffusion barrier layer. The diffusion barrier layer separates the polycrystal silicon conductor from the single crystal silicon diffusion layer. The diffusion barrier layer prevents a diffusion of at least one of silicon-interstitial and silicon-vacancy between the single crystal silicon diffusion layer and the polycrystal silicon conductor.

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patent: 6274489 (2001-08-01), Ono et al.
patent: 6858529 (2005-02-01), Chung et al.
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patent: 2003/0173593 (2003-09-01), Miyatake et al.
patent: 2004/0007737 (2004-01-01), Cho et al.
patent: 2005/0040401 (2005-02-01), Yamazaki et al.
patent: 2005/0095857 (2005-05-01), Chung et al.

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