Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2007-08-06
2010-06-08
Fulk, Steven J (Department: 2891)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C257S072000, C257SE21134
Reexamination Certificate
active
07732268
ABSTRACT:
A method of manufacturing a display device to improve the quality of a polycrystal silicon upon dehydrogenating and polycrystallizing an amorphous silicon at the outside of a display region of a substrate, by forming a plurality of pixels having TFT devices using an amorphous silicon in the display region of the substrate, and forming a plurality of driving circuits having semiconductor devices using a polycrystal silicon at the outside of the display region, the method including irradiation of a first continuous oscillation laser only to the amorphous silicon in the region for forming the driving circuit and the peripheral region thereof to conduct dehydrogenation and then irradiation of a second continuous oscillation region only to the dehydrogenated region to polycrystallize the amorphous silicon, wherein the region to which the first continuous oscillation laser is irradiated is wider than the region to which the second continuous oscillation laser is irradiated.
REFERENCES:
patent: 5413958 (1995-05-01), Imahashi et al.
patent: 2001/0000243 (2001-04-01), Sugano et al.
patent: 2002/0072252 (2002-06-01), Nakajima et al.
patent: 2003/0017658 (2003-01-01), Nishitani et al.
patent: 2003/0094585 (2003-05-01), Hara et al.
patent: 6-61172 (1992-08-01), None
patent: 8-129189 (1993-11-01), None
patent: 2002-64060 (2000-08-01), None
patent: 2002-158173 (2001-09-01), None
Hongo Mikio
Kaitoh Takuo
Noda Takeshi
Shimmoto Hideaki
Yazaki Akio
A. Marquez, Esq. Juan Carlos
Fulk Steven J
Hitachi Displays Ltd.
Stites & Harbison PLLC
LandOfFree
Manufacturing method of display device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Manufacturing method of display device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method of display device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4233618