Optical measurment systems and methods

Details Optical measurment systems and methods Optical measurment systems and methods

2007-04-04

2010-12-07

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C250S216000, C250S226000, C356S225000, C356S364000, C356S445000

Reexamination Certificate

active

07847937

ABSTRACT:
An optical measurement system includes a rotating element ellipsometer comprising a radiant source and a rotating optical element coupled to the radian source, an optical system to provide a modulated pump beam, a detection system optically coupled to the ellipsometer and a signal analyzer. The rotating element ellipsometer is configured to deliver a probe beam to a measurement spot on a sample and to measure one or more ellipsometric parameters of the sample at one or more discrete wavelengths or wavelength ranges, or a plurality of wavelengths across a wavelength range. Methods for determining sample characteristics from radiation scattered, reflected, diffracted or otherwise emitted from a sample surface using the optical measurement systems are also disclosed.

REFERENCES:
patent: 6597446 (2003-07-01), Klooster et al.
patent: 7239392 (2007-07-01), Chism, II
patent: 7369234 (2008-05-01), Beaglehole
patent: 7505154 (2009-03-01), Maris

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