Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2007-07-03
2010-02-02
Stark, Jarrett J (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257SE21521, C324S071400, C324S464000
Reexamination Certificate
active
07655945
ABSTRACT:
An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.
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Asbach Christof
Fissan Heinz
Liu Yi
Pui David Y.
Regents of the University of Minnesota
Stark Jarrett J
Westman Champlin & Kelly P.A.
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