Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate
2007-12-31
2010-10-26
Tsai, Carol S (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
C702S075000, C702S076000, C702S081000
Reexamination Certificate
active
07822565
ABSTRACT:
A system and method for monitoring RF power is described. In one embodiment the system samples RF power that is generated by an RF generator to obtain RF signals that include information indicative of electrical characteristics at a plurality of particular frequencies that fall within a frequency range. The RF signals are digitized to obtain a stream of digital RF signals that include information indicative of electrical characteristics at the plurality of particular frequencies, and the information indicative of electrical characteristics is successively transformed, for each of the plurality of particular frequencies, from a time domain into a frequency domain.
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Discrete Fourier Transform, obtained from: http://en.wikipedia.org/wiki/Discrete—Fourier—transform; original publication date: unknown; site visited Sep. 10, 2009.
Brouk Victor
Roberg Jeff
Advanced Energy Industries Inc.
Neugeboren O'Dowd PC
O'Dowd Sean R.
Suarez Felix E
Tsai Carol S
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