Method of forming a micro-electromechanical (MEMS) switch

Details Method of forming a micro-electromechanical (MEMS) switch Method of forming a micro-electromechanical (MEMS) switch

2008-01-03

2010-06-01

Phan, Thiem (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S602100, C029S842000, C200S209000, C200S210000, C200S214000, C335S052000, C335S060000

Reexamination Certificate

active

07726010

ABSTRACT:
A method of fabricating a MEMS switch having a free moving inductive element within in micro-cavity guided by at least one inductive coil. The switch consists of an upper inductive coil at one end of a micro-cavity; optionally, a lower inductive coil; and a free-moving inductive element preferably made of magnetic material. The coils are provided with an inner permalloy core. Switching is achieved by passing a current through the upper coil, inducing a magnetic field unto the inductive element. The magnetic field attracts the free-moving inductive element upwards, shorting two open conductive wires, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the conductive wires open. When the chip is not mounted with the correct orientation, the lower coil pulls the free-moving inductive element back at its original position.

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patent: 2003/0156451 (2003-08-01), Tamura et al.
patent: 2004/0050674 (2004-03-01), Rubel
patent: 0552659 (2006-02-01), None
patent: 0642235 (2006-11-01), None

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