Apparatus for electroless deposition of metals onto...

Details Apparatus for electroless deposition of metals onto... Apparatus for electroless deposition of metals onto...

2005-07-06

2010-02-02

Edwards, Laura (Department: 1792)

Coating apparatus

With means to centrifuge work

C118S319000, C118S320000, C118S724000, C118S725000, C118S728000, C118S729000, C118S730000, C118S500000

Reexamination Certificate

active

07654221

ABSTRACT:
An electroless deposition system and electroless deposition stations are provided. The system includes a processing mainframe, at least one substrate cleaning station positioned on the mainframe, and an electroless deposition station positioned on the mainframe. The electroless deposition station includes an environmentally controlled processing enclosure, a first processing station configured to clean and activate a surface of a substrate, a second processing station configured to electrolessly deposit a layer onto the surface of the substrate, and a substrate shuttle positioned to transfer substrates between the first and second processing stations. The electroless deposition station also includes various fluid delivery and substrate temperature controlling devices to perform a contamination free and uniform electroless deposition process.

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