Micro actuator having tilt and vertical displacement and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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C359S224100, C359S290000

Reexamination Certificate

active

07859167

ABSTRACT:
A microactuator according to the present invention comprises a base1, a movable section7which is capable of displacement relative to the base1, an elastic supporting member5for supporting the movable section7, and driving sections4ato4cfor causing the movable section7to be displaced. A specific relationship is imposed on a spring modulus responsive to a displacement of the movable section7along a vertical direction and a spring modulus responsive to a tilt angle of the movable section7, and the diagonality between the driving force and the displacement of the movable section7is increased, thus realizing accuracy improvements and simplification of control of the microactuator.

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International Search Report for corresponding Application No. PCT/JP2005/003533 mailed Apr. 19, 2005.
Uthara Srinvasan et al.; “Fluidic Self-Assembly of Micromirrors Onto Microactuators Using Capillary Forces”, IEEE Journal on Selected Topics in Quantam Electronics, vol. 8, No. 1, pp. 4-11, Jan./Feb. 2002. (Cited in [0003] on p. 2 of the description).

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