SiO x :Si composite articles and methods of making same

Details SiO x :Si composite articles and methods of making same SiO x :Si composite articles and methods of making same

2005-08-11

2010-02-09

Wu, David (Department: 1796)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S298120, C252S500000

Reexamination Certificate

active

07658822

ABSTRACT:
Article are made from silicon oxide and electrically conductive doped silicon materials that are joined in a protective environment to yield a composite SiOx:Si material that exhibits the properties of SiOxand yet is electrically conductive due to the presence of the Si. Articles from such composite materials find many uses, such as for targets for DC and/or AC sputtering processes to produce silicon oxide thin films for touch-screen application, barrier thin films in LCD displays and optical thin films used in a wide variety of applications.

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Office Action for U.S. Appl. No. 11/201,791, dated Jun. 22, 2009; USPTO.
Office Action for U.S. Appl. No. 11/201,782, dated Aug. 11, 2005; USPTO.

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