Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2003-12-10
2010-11-23
Hassanzadeh, Parviz (Department: 1716)
Coating apparatus
Gas or vapor deposition
Work support
C118S728000, C156S345220, C156S345310, C156S345510, C156S345540, C414S939000, C204S298230, C204S298250
Reexamination Certificate
active
07837799
ABSTRACT:
An arrangement for transporting a flat substrate through a coating installation, wherein the coating installation comprises, e.g., several and different sputter cathodes, to which the flat substrate, for example a glass pane, is transported one after the other in vacuo. So that no abrasion is generated between glass pane and contact, the glass pane is kept spaced apart from the contact by means of gas pressure. The gas pressure is herein built up through relatively few and small holes in a gas channel. Since during flooding of the coating installation to atmospheric pressure or during evacuation, due to the small holes, no fast pressure equalization between gas channel and the remaining coating installation is possible, the gas channel is decoupled in terms of gas from the remaining coating installation and provided with a separate gas line, via which gas can be introduced into the gas channel or pumped out of it.
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Bangert Stefan
Fuchs Frank
Lindenberg Ralph
Schuessler Uwe
Stolley Tobias
Applied Materials GmbH & Co. KG
Dhingra Rakesh
Fulbright & Jaworski L.L.P.
Hassanzadeh Parviz
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