4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Ralph Lindenberg

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Arrangement for transporting a flat substrate in a vacuum...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Drive mechanism for a vacuum treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3017075

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