Semiconductor device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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Details

C438S652000, C438S280000, C438S619000, C257S776000, C257SE23168

Reexamination Certificate

active

07812451

ABSTRACT:
A semiconductor device includes a first wiring layer, a second wiring layer and a third wiring layer. The first wiring layer is formed on a semiconductor substrate. The second and the third wiring layer wiring layers are arranged in a direction intersecting with the first wiring layer on respective sides of the wiring layer. An air bridge wiring intersects the second and third wiring layers sandwiching an air layer above the first wiring layer therewith. The overall shape of the air bridge wiring has an upward convex curvature in an arch shape and the transverse sectional shape of the air bridge wiring is in the form of a downward concave curvature.

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patent: 5817446 (1998-10-01), Lammert
patent: 6261934 (2001-07-01), Kraft et al.
patent: 6268262 (2001-07-01), Loboda
patent: 6504189 (2003-01-01), Matsuda et al.
patent: 5-152452 (1993-06-01), None
patent: 5-218213 (1993-08-01), None
patent: 6-89940 (1994-03-01), None
patent: 7-135251 (1995-05-01), None
patent: 8-236628 (1996-09-01), None

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