Positive resist composition for electron beam, X-ray or EUV...

Details Positive resist composition for electron beam, X-ray or EUV... Positive resist composition for electron beam, X-ray or EUV...

2008-10-27

2010-12-28

Walke, Amanda C. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S913000, C568S019000, C568S028000

Reexamination Certificate

active

07858289

ABSTRACT:
A positive resist composition for electron beam, X-ray or EUV includes a compound having a proton acceptor functional group and capable of producing an acid radical upon irradiation with an actinic ray or radiation to reduce or lose the acceptor property or to change the proton acceptor functional group to be acidic, wherein the positive resist composition has a solid content concentration of from 2.5 to 4.5 mass %.

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