Termination structure for mosgated device with reduced mask coun

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257491, 257355, H01L 2978, H01L 2940

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active

055571271

ABSTRACT:
A termination structure for a MOSgated device uses a plurality of series-connected lateral P-MOS devices extending in series, from source to drain of the main device. The P-MOS devices are formed in ring fashion around the periphery of the area being terminated. A plurality of concentric spaced P rings diffused into an N type chip termination area are covered by the main device gate oxide which is, in turn, covered with conductive polysilicon to act as a gate for the P-MOS devices so formed. The innermost P ring of each pair of P rings is connected to its gate to prevent turn on of the N channel device. The breakdown voltage of the termination is the sum of the threshold voltage of the P-MOS transistors. A zener diode can be added to the chain to increase the breakdown voltage of the termination.

REFERENCES:
patent: 4468686 (1984-08-01), Rosenthal
patent: 4567502 (1986-01-01), Nakagawa et al.
patent: 5089864 (1992-02-01), Sakurai

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