Gate valve apparatus of vacuum processing system

Details Gate valve apparatus of vacuum processing system Gate valve apparatus of vacuum processing system

2005-12-16

2009-12-29

Fox, Charles A (Department: 3652)

Valves and valve actuation

With means to increase head and seat contact pressure

With positive reduction

Reexamination Certificate

active

07637477

ABSTRACT:
A gate valve apparatus of a vacuum processing system includes a surrounding wall that defines a transfer space and has a transfer port. A first valve seat is defined around the transfer port. A valve body is movable within the surrounding wall to open/close the transfer port. A first seal member is disposed on the valve body to engage with the first valve seat. A maintenance port is formed in the surrounding wall to perform maintenance of the first seal member. A second valve seat is defined around the maintenance port. A second seal member is disposed around the first seal member on the valve body to engage with the second valve seat. A maintenance cover is detachably attached outside to close the maintenance port. A driving mechanism drives the valve body within the surrounding wall.

REFERENCES:
patent: 6267545 (2001-07-01), Mooring et al.
patent: 6698719 (2004-03-01), Geiser
patent: 6932111 (2005-08-01), Ishigaki
patent: 7281700 (2007-10-01), Hiroki
patent: 8-60374 (1996-03-01), None
patent: 2003-503844 (2003-01-01), None

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