Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate
2003-07-07
2009-12-29
Fineman, Lee (Department: 2872)
Optical: systems and elements
Compound lens system
With curved reflective imaging element
C359S355000, C359S727000
Reexamination Certificate
active
07639419
ABSTRACT:
A system for use with a reduced size catadioptric objective is disclosed. The system including the reduced size objective includes various subsystems to allow enhanced imaging, the subsystems including illumination, imaging, autofocus, positioning, sensor, data acquisition, and data analysis. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and elements of the objective are less than 100 mm in diameter. The objective comprises a focusing lens group and at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement. The design imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90 to a specimen for imaging purposes, and the design may be employed in various environments.
REFERENCES:
patent: 1973066 (1934-09-01), Hauser et al.
patent: 2661658 (1953-12-01), Dyson
patent: 3237515 (1966-03-01), Altman
patent: 4155630 (1979-05-01), Ih
patent: 4511220 (1985-04-01), Scully
patent: 4647158 (1987-03-01), Yeadon
patent: 4758088 (1988-07-01), Doyle
patent: 4779966 (1988-10-01), Friedman
patent: 4795244 (1989-01-01), Uehara
patent: 4898471 (1990-02-01), Vaught et al.
patent: 4971428 (1990-11-01), Moskovich
patent: 4974094 (1990-11-01), Morito
patent: 5031976 (1991-07-01), Shafer
patent: 5089913 (1992-02-01), Singh et al.
patent: 5114238 (1992-05-01), Sigler
patent: 5140459 (1992-08-01), Sagan
patent: 5162939 (1992-11-01), Herron et al.
patent: 5177559 (1993-01-01), Batchelder et al.
patent: 5233460 (1993-08-01), Partlo
patent: 5264912 (1993-11-01), Vaught et al.
patent: 5274494 (1993-12-01), Rafanelli et al.
patent: 5309456 (1994-05-01), Horton
patent: 5323263 (1994-06-01), Schoenmakers
patent: 5337170 (1994-08-01), Khoury et al.
patent: 5428442 (1995-06-01), Lin et al.
patent: 5434662 (1995-07-01), Rockwell et al.
patent: 5488229 (1996-01-01), Elliott et al.
patent: 5515207 (1996-05-01), Foo
patent: 5621529 (1997-04-01), Gordon et al.
patent: 5636066 (1997-06-01), Takahashi
patent: 5644140 (1997-07-01), Biedermann et al.
patent: 5668673 (1997-09-01), Suenaga et al.
patent: 5717518 (1998-02-01), Shafer et al.
patent: 5729374 (1998-03-01), Tiszauer et al.
patent: 5805334 (1998-09-01), Takahashi
patent: 5805357 (1998-09-01), Omura
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5808805 (1998-09-01), Takahashi
patent: 5835275 (1998-11-01), Takahashi et al.
patent: 5849468 (1998-12-01), Sawyer
patent: 5851740 (1998-12-01), Sawyer
patent: 5861997 (1999-01-01), Takahashi
patent: 5880891 (1999-03-01), Furter
patent: 5990983 (1999-11-01), Hargis et al.
patent: 5999310 (1999-12-01), Shafer et al.
patent: 6064517 (2000-05-01), Chuang et al.
patent: 6191887 (2001-02-01), Michaloski et al.
patent: 6275514 (2001-08-01), Katzir et al.
patent: 6370178 (2002-04-01), Papayoanou et al.
patent: 6388819 (2002-05-01), Leidig
patent: 6548797 (2003-04-01), Ai
patent: 6692431 (2004-02-01), Kazakevich
patent: 6842298 (2005-01-01), Shafer et al.
patent: 2001/0040722 (2001-11-01), Shafer et al.
patent: 2004/0051957 (2004-03-01), Liang
patent: 108181 (1900-01-01), None
patent: 3742806 (1989-07-01), None
patent: 0798585 (1997-10-01), None
patent: 2269024 (1994-01-01), None
patent: 9712226 (1997-04-01), None
patent: 9908134 (1999-02-01), None
The Photonics Design & Applications Handbook (Book 3), 1999, Laurin Publishing Co. Inc., 45th Edition, pp. H-259 to H-263.
M.R. Bartz et al., “LED Print Analyzer,” IBM Technical Disclosure Bulletin, vol. 14, No. 3, Aug. 1971.
D.S. Goodman, “Darkfield Illuminator Attachment,” IBM Technical Disclosure Bulletin, vol. 27, No. 5, Oct. 1984.
J.L.C. Sanz et al., “Automated Visual Inspection with Dark-Field Microscopy,” Journal of the Optical Society of America, Nov. 1985, USA, vol. 2, No. 11, pp. 1857-1862.
Carl Zeiss Brochure, “MSM 193 Microlithography Simulation Microscope,” 1999.
Armstrong J. Joseph
Chuang Yung-Ho
Shafer David R.
Fineman Lee
KLA-Tencor Technologies, Inc.
Smyrski Law Group, A P.C.
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