Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2006-11-28
2009-11-17
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000
Reexamination Certificate
active
07619220
ABSTRACT:
A method and apparatus for correcting aberrations using a Ronchigram. A STEM apparatus has first calculation means for taking autocorrelation of minute regions on a Ronchigram of an amorphous specimen, detection device for detecting aberrations in the beam formed from local angular regions on an aperture plane from the autocorrelation or from Fourier analysis of the autocorrelation, second calculation device for calculating the aberrations based on the results of the detection, and control device for controlling operation for correcting the aberrations based on results of calculations performed by the second calculation device.
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Sannomiya Takumi
Sawada Hidetaka
Berman Jack I
JEOL Ltd.
Purinton Brooke
The Webb Law Firm
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