Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2006-02-28
2009-06-09
Vu, David (Department: 2818)
Semiconductor device manufacturing: process
Electron emitter manufacture
C438S460000, C438S462000, C438S962000, C977S742000, C977S750000, C977S752000, C977S773000, C977S745000, C977S748000, C977S856000, C977S857000, C313S309000, C313S311000, C313S310000, C257SE39001, C257SE39002, C257SE51038, C257SE51040, C257SE29096, C445S050000, C445S051000
Reexamination Certificate
active
07544523
ABSTRACT:
A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic “modules” which can be easily manipulated and shaped to fit standard mounts in various devices.
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Magera Gerald
Schwind Gregory
Scipioni Lawrence
FEI Company
Fox Brandon
Griner David
Scheinberg Michael O.
Scheinberg & Griner LLP
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