Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor
Reexamination Certificate
2008-09-18
2009-08-04
Neckel, Alexa D. (Department: 1795)
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
C422S228000, C422S232000, C422S198000, C392S386000, C392S388000, C392S389000, C392S390000
Reexamination Certificate
active
07569191
ABSTRACT:
Embodiments of the invention provide a method and an apparatus for generating a gaseous chemical precursor for a processing system. In one embodiment, an apparatus for generating the gaseous chemical precursor used in a vapor deposition processing system is provided and includes a canister having a sidewall, a top, and a bottom encompassing an interior volume therein, an inlet port and an outlet port in fluid communication with the interior volume, and an inlet tube extending from the inlet port into the canister, wherein the inlet tube contains an outlet positioned to direct a gas flow away from the outlet port and towards the sidewall of the canister.
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Chen Ling
Ganguli Seshadri
Ku Vincent W.
Applied Materials Inc.
Handal Kaity V.
Neckel Alexa D.
Patterson & Sheridan LLP
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