Method of making corrugated vertical stack capacitor (CVSTC)

Details Method of making corrugated vertical stack capacitor (CVSTC) Method of making corrugated vertical stack capacitor (CVSTC)

1995-06-07

1996-09-17

Thomas, Tom

Fishing, trapping, and vermin destroying

437 60, 437229, 437919, 437977, H01L 218242

Patent

active

055568025

ABSTRACT:
A method for forming a capacitor on a substrate having a contact below a top layer including the steps of:

REFERENCES:
patent: 4906590 (1990-03-01), Kanetaki et al.
patent: 5185282 (1993-02-01), Lee et al.
patent: 5284787 (1994-08-01), Ahm
patent: 5292677 (1994-03-01), Dennison
patent: 5438011 (1995-08-01), Blalock et al.

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