Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-12-20
2009-10-13
Coleman, W. David (Department: 2813)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C257S758000, C257SE23144
Reexamination Certificate
active
07601629
ABSTRACT:
The invention provides a method of fabricating a semiconductive device [200]. In this embodiment, the method comprises depositing a hydrocarbon layer [294] over a semiconductive substrate, forming an interconnect structure [295, 297] within the hydrocarbon layer [294], and removing the hydrocarbon layer [294] by sublimation.
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Guldi Richard L.
Haider Asad
Poag Frank
Ramappa Deepak A.
Brady III Wade J.
Coleman W. David
Garner Jacqueline J.
McCall-Shepard Sonya D
Telecky , Jr. Frederick J.
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