Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Reexamination Certificate
2007-11-21
2009-06-23
Soward, Ida M (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Amorphous semiconductor material
C257S057000, C257S066000, C257S072000, C257SE29117, C257SE29147, C257SE29151, C257SE29202, C257SE29273
Reexamination Certificate
active
07550768
ABSTRACT:
The present invention provides a TFT array panel and a manufacturing method of the same, which has signal lines including a lower layer of an Al containing metal and an upper layer of a molybdenum alloy (Mo-alloy) comprising molybdenum (Mo) and at least one of niobium (Nb), vanadium (V), and titanium (Ti). Accordingly, undercut, overhang, and mouse bites which may arise in an etching process, are prevented, and TFT array panels that have signal lines having low resistivity and good contact characteristics are provided.
REFERENCES:
patent: 5543946 (1996-08-01), Economoto et al.
patent: 5831694 (1998-11-01), Onisawa et al.
patent: 5949507 (1999-09-01), Shimada et al.
patent: 6958802 (2005-10-01), Watamura
patent: 7105896 (2006-09-01), Tanaka et al.
patent: 7176489 (2007-02-01), Ahn et al.
patent: 2002/0004886 (2002-01-01), Hagersten et al.
patent: 2003/0136971 (2003-07-01), Rhee et al.
patent: 2003/0203627 (2003-10-01), Pang
patent: 2004/0006181 (2004-01-01), Isogawa
patent: 2004/0135173 (2004-07-01), Choi et al.
patent: 2004/0253771 (2004-12-01), Yamazaki et al.
patent: 9-026598 (1997-01-01), None
patent: 2000314897 (2000-11-01), None
patent: 2002-190212 (2002-07-01), None
patent: 2004-140319 (2003-04-01), None
patent: 163901 (2004-06-01), None
patent: 10-1997-0002414 (1997-01-01), None
patent: 10-2001-0068334 (2001-07-01), None
patent: 10-0318369 (2001-12-01), None
patent: 10-2002-0039736 (2002-05-01), None
patent: 10-2004-0001689 (2002-06-01), None
patent: 10-2004-0040929 (2004-05-01), None
patent: 10-2004-0059088 (2004-07-01), None
Bae Yang-Ho
Cho Beom-Seok
Jeong Chang-Oh
Lee Je-Hun
Haynes and Boone LLP
Samsung Electronics Co,. Ltd.
Soward Ida M
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