Method of forming a coated film, method of forming an...

Details Method of forming a coated film, method of forming an... Method of forming a coated film, method of forming an...

2006-01-03

2009-06-09

Lebentritt, Michael S (Department: 2829)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S761000, C438S790000, C257SE21174, C257SE21175, C257SE21243, C257SE21279, C257SE21576, C257SE23161, C257SE29117, C257SE29147

Reexamination Certificate

active

07544614

ABSTRACT:
A slit forming process with respect to a coated film, includes:forming a step pattern having an end part on a substrate;coating a liquid material for forming a coated film on the substrate in the manner of covering at least the end part of the step pattern; andforming the coated film by drying the coated liquid material, together with forming a slit at a position corresponding to the end part of the step pattern.

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