Electron beam system and method of operating the same

Details Electron beam system and method of operating the same Electron beam system and method of operating the same

2007-10-17

2009-08-04

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

07569819

ABSTRACT:
An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same contrast at all times if the atomic number differences are the same when illumination conditions including accelerating voltage and emission current are varied or when the specimens are imaged with different instruments.

REFERENCES:
patent: 5717204 (1998-02-01), Meisburger et al.
patent: 52-117192 (1977-10-01), None
patent: 08-148111 (1996-06-01), None
patent: 08-201317 (1996-08-01), None
patent: 2000-036276 (2000-02-01), None

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