Migration of integrated circuit layout for alternating phase...

Details Migration of integrated circuit layout for alternating phase... Migration of integrated circuit layout for alternating phase...

2007-03-28

2009-06-02

Siek, Vuthe (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000, C716S030000, C716S030000, C716S030000, C716S030000, C716S030000, C430S005000, C430S030000

Reexamination Certificate

active

07543252

ABSTRACT:
Method, system and program product for migrating an integrated circuit (IC) layout for, for example, alternating aperture phase shift masks (AltPSM), are disclosed. In order to migrate a layout to phase compliance, jogs are identified on a first (AltPSM) layer and shifted to another second layer. Isolated or clustered jogs are shifted into an open channel portions on the second layer where possible. Remaining clustered jogs are shifted into as few new channels as possible on the second layer. The jog removal process leaves unidirectional wires that can be trivially phase colored. Standard technology migration techniques are then used to legalize the results on the layers.

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