Semiconductor memory device having charge storage layer and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S316000

Reexamination Certificate

active

07602011

ABSTRACT:
The semiconductor memory device according to the present invention includes a charge storage layer26formed over a semiconductor substrate10and including a plurality of particles16as charge storage bodies in insulating films12, 24, and a gate electrode30formed over the charge storage layer26, in which the particles16are formed of metal oxide or metal nitride.

REFERENCES:
patent: 6060743 (2000-05-01), Sugiyama et al.
patent: 2003/0185071 (2003-10-01), Yoshino
patent: 2003/0222294 (2003-12-01), Yoshino
patent: 2005/0122775 (2005-06-01), Koyanagi et al.
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patent: 2003-133540 (2003-05-01), None
patent: 2003-282748 (2003-10-01), None
patent: 2003-347437 (2003-12-01), None
patent: 2004-55969 (2004-02-01), None
patent: 2004-111734 (2004-04-01), None
patent: WO 2004/010508 (2004-01-01), None
International Search Report of PCT/JP2004/017776, mailing date Jan. 18, 2005.
Prior Art Information List.

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