Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-08-03
2009-06-23
Lindsay, Jr., Walter L (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S612000, C438S617000, C438S637000, C257SE21495, C257SE21508, C257SE21576, C257SE21577, C257SE21579
Reexamination Certificate
active
07550376
ABSTRACT:
An interlayer insulating film is formed on a semiconductor substrate. An intra-layer insulating film is formed on the interlayer film. A recess is formed through the intra-layer film. The recess has a pad-part and a wiring-part continuous with the pad-part. The pad-part is wider than the width of the wiring-part. Convex regions are left in the pad-part. The convex regions are disposed in such a manner that a recess area ratio in a near wiring area superposed upon an extended area of the wiring-part into the pad-part, within a first frame area having as an outer periphery an outer periphery of the pad-part and having a first width, becomes larger than a recess area ratio in a second frame area having as an outer periphery an inner periphery of the first frame area and having a second width. A conductive film is filled in the recess.
REFERENCES:
patent: 6163074 (2000-12-01), Lee et al.
patent: 6297563 (2001-10-01), Yamaha
patent: 6417575 (2002-07-01), Harada et al.
patent: 7119006 (2006-10-01), Kraft
patent: 7274104 (2007-09-01), Takewaki
patent: 10-229085 (1998-08-01), None
patent: 11-150114 (1999-06-01), None
Ahmadi Mohsen
Fujitsu Microelectronics Limited
Kratz, Quintos & Hanson, LLP.
Lindsay, Jr. Walter L
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