Semiconductor device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S321000, C257S324000

Reexamination Certificate

active

07573091

ABSTRACT:
The present invention relates to a semiconductor device that includes a semiconductor substrate (10) having source/drain diffusion regions (14) formed therein and control gates (20) formed thereon, with grooves (18) being formed on the surface of the semiconductor substrate (10) and being located below the control gates (20) and between the source/drain diffusion regions (14). The grooves (18) are separated from the source/drain diffusion regions (14), thereby increasing the effective channel length to maintain a constant channel length for charge accumulation while enabling the manufacture of smaller memory cells. The present invention also provides a method of manufacturing the semiconductor device.

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patent: 6011725 (2000-01-01), Eitan
patent: 7091550 (2006-08-01), Hsu et al.
patent: 2004/0082198 (2004-04-01), Nakamura et al.
patent: 2004/0110390 (2004-06-01), Takagi et al.
patent: 07-226513 (1995-08-01), None
patent: 2004-012573 (2004-01-01), None
patent: 2004-111737 (2004-04-01), None
patent: 2004-193178 (2004-07-01), None

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