Method of forming micropattern, method of manufacturing...

Details Method of forming micropattern, method of manufacturing... Method of forming micropattern, method of manufacturing...

2004-08-04

2009-11-17

Huff, Mark F (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S322000

Reexamination Certificate

active

07618768

ABSTRACT:
By using an existing, relatively inexpensive manufacturing device, micropatterns (e.g. guiding grooves, prepits) having such track pitch and pit pitch that are smaller than the diameter of a light spot are formed more finely. There are provided at least two layers, i.e. (i) a resin substrate and (ii) a depressed part inducing layer made of dielectric material or metal oxide. A light beam is radiated and focused onto the depressed part inducing layer so as to form pit parts and/or guiding grooves on irradiated parts of the resin substrate. The depressed part inducing layer is then removed, so as to expose the pit parts and/or guiding grooves.

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Clariant Product Data Sheet, product “AZ-5214E”.
Translation of JP 08 099477(Apr. 1996).

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