Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-04-05
2008-11-25
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C310S324000, C310S349000, C310S367000
Reexamination Certificate
active
07456709
ABSTRACT:
A bulk acoustic resonance and a method for fabricating the bulk acoustic resonator, the bulk acoustic resonator including: a substrate including an upper surface defining a predetermined area including a cavity; a resonance part positioned above the cavity and including a surface comprising a dimple; and an anchor part connecting the resonance part to the substrate. The resonance part includes: a lower electrode including a lower surface including a predetermined dimpled area and an upper surface opposite to the predetermined dimpled area; a piezoelectric layer stacked on the upper surface of the lower electrode; and an upper electrode stacked on the piezoelectric layer. Because direction of the vibration of the resonator is adjustable by adjusting position, area, and the number of the dimples, process freedom can be improved.
REFERENCES:
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patent: 7046103 (2006-05-01), Whatmore et al.
patent: 7187254 (2007-03-01), Su et al.
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patent: WO 2005/060091 (2005-06-01), None
Jung Kyu-dong
Kim Woon-bae
Kwon Jong-oh
Song In-sang
Samsung Electronics Co,. Ltd.
Sughrue & Mion, PLLC
Summons Barbara
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