Phase change memory device and manufacturing method

Details Phase change memory device and manufacturing method Phase change memory device and manufacturing method

2006-07-21

2008-11-11

Nguyen, Viet Q (Department: 2827)

Static information storage and retrieval

Systems using particular element

Resistive

C365S163000, C257S379000, C257S537000, C257S004000, C257S529000

Reexamination Certificate

active

07450411

ABSTRACT:
A phase change memory device comprises a photolithographically formed phase change memory cell having first and second electrodes and a phase change bridge positioned between and electrically coupling the opposed sides of the electrodes to one another. The phase change bridge has a length, a width and a thickness. The width, the thickness and the length are less than a minimum photolithographic feature size of the process used to form the phase change memory cell. The size of the photoresist masks used in forming the memory cell may be reduced so that the width and the length of the phase change bridge are each less than the minimum photolithographic feature size.

REFERENCES:
patent: 3271591 (1966-09-01), Ovshinsky
patent: 3530441 (1970-09-01), Ovshinsky
patent: 4599705 (1986-07-01), Holmberg et al.
patent: 4719594 (1988-01-01), Young et al.
patent: 4876220 (1989-10-01), Mohsen et al.
patent: 4959812 (1990-09-01), Momodomi et al.
patent: 5166096 (1992-11-01), Cote et al.
patent: 5166758 (1992-11-01), Ovshinsky et al.
patent: 5177567 (1993-01-01), Klersy et al.
patent: 5332923 (1994-07-01), Takeuchi et al.
patent: 5391901 (1995-02-01), Tanabe et al.
patent: 5515488 (1996-05-01), Hoppe et al.
patent: 5534712 (1996-07-01), Ovshinsky et al.
patent: 5687112 (1997-11-01), Ovshinsky
patent: 5789277 (1998-08-01), Zahorik et al.
patent: 5789758 (1998-08-01), Reinberg
patent: 5814527 (1998-09-01), Wolstenholme et al.
patent: 5831276 (1998-11-01), Gonzalez et al.
patent: 5837564 (1998-11-01), Sandhu et al.
patent: 5869843 (1999-02-01), Harshfield
patent: 5879955 (1999-03-01), Gonzalez et al.
patent: 5902704 (1999-05-01), Schoenborn et al.
patent: 5920788 (1999-07-01), Reinberg
patent: 5952671 (1999-09-01), Reinberg et al.
patent: 5958358 (1999-09-01), Tenne et al.
patent: 5970336 (1999-10-01), Wolstenholme et al.
patent: 5985698 (1999-11-01), Gonzalez et al.
patent: 5998244 (1999-12-01), Wolstenholme et al.
patent: 6011725 (2000-01-01), Eitan
patent: 6025220 (2000-02-01), Sandhu
patent: 6031287 (2000-02-01), Harshfield
patent: 6034882 (2000-03-01), Johnson et al.
patent: 6066870 (2000-05-01), Siek
patent: 6077674 (2000-06-01), Schleifer et al.
patent: 6077729 (2000-06-01), Harshfield
patent: 6087269 (2000-07-01), Williams
patent: 6087674 (2000-07-01), Ovshinsky et al.
patent: 6104038 (2000-08-01), Gonzalez et al.
patent: 6111264 (2000-08-01), Wolstenholme et al.
patent: 6114713 (2000-09-01), Zahorik
patent: 6117720 (2000-09-01), Harshfield
patent: 6147395 (2000-11-01), Gilgen
patent: 6150253 (2000-11-01), Doan et al.
patent: 6153890 (2000-11-01), Wolstenholme et al.
patent: 6177317 (2001-01-01), Huang et al.
patent: 6185122 (2001-02-01), Johnson et al.
patent: 6189582 (2001-02-01), Reinberg et al.
patent: 6236059 (2001-05-01), Wolstenholme et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6271090 (2001-08-01), Huang et al.
patent: 6280684 (2001-08-01), Yamada et al.
patent: 6287887 (2001-09-01), Gilgen
patent: 6314014 (2001-11-01), Lowrey et al.
patent: 6320786 (2001-11-01), Chang et al.
patent: 6339544 (2002-01-01), Chiang et al.
patent: 6351406 (2002-02-01), Johnson et al.
patent: 6372651 (2002-04-01), Yang et al.
patent: 6420215 (2002-07-01), Knall et al.
patent: 6420216 (2002-07-01), Clevenger et al.
patent: 6420725 (2002-07-01), Harshfield
patent: 6423621 (2002-07-01), Doan et al.
patent: 6429064 (2002-08-01), Wicker
patent: 6456525 (2002-09-01), Perner et al.
patent: 6462353 (2002-10-01), Gilgen
patent: 6483736 (2002-11-01), Johnson et al.
patent: 6487114 (2002-11-01), Jong et al.
patent: 6501111 (2002-12-01), Lowrey
patent: 6511867 (2003-01-01), Lowrey et al.
patent: 6512241 (2003-01-01), Lai
patent: 6514788 (2003-02-01), Quinn
patent: 6534781 (2003-03-01), Dennison
patent: 6545903 (2003-04-01), Wu
patent: 6555860 (2003-04-01), Lowrey et al.
patent: 6563156 (2003-05-01), Harshfield
patent: 6566700 (2003-05-01), Xu
patent: 6567293 (2003-05-01), Lowrey et al.
patent: 6579760 (2003-06-01), Lung
patent: 6586761 (2003-07-01), Lowrey
patent: 6589714 (2003-07-01), Maimon et al.
patent: 6593176 (2003-07-01), Dennison
patent: 6597009 (2003-07-01), Wicker
patent: 6605527 (2003-08-01), Dennison et al.
patent: 6605821 (2003-08-01), Lee et al.
patent: 6607974 (2003-08-01), Harshfield
patent: 6613604 (2003-09-01), Maimon et al.
patent: 6617192 (2003-09-01), Lowrey et al.
patent: 6620715 (2003-09-01), Blosse et al.
patent: 6621095 (2003-09-01), Chiang et al.
patent: 6627530 (2003-09-01), Li et al.
patent: 6639849 (2003-10-01), Takahashi et al.
patent: 6673700 (2004-01-01), Dennison et al.
patent: 6744088 (2004-06-01), Dennison
patent: 6791102 (2004-09-01), Johnson et al.
patent: 6797979 (2004-09-01), Chiang et al.
patent: 6800504 (2004-10-01), Li et al.
patent: 6800563 (2004-10-01), Xu
patent: 6805563 (2004-10-01), Ohashi
patent: 6808991 (2004-10-01), Tung et al.
patent: 6815704 (2004-11-01), Chen
patent: 6830952 (2004-12-01), Lung et al.
patent: 6850432 (2005-02-01), Lu et al.
patent: 6859389 (2005-02-01), Idehara et al.
patent: 6861267 (2005-03-01), Xu et al.
patent: 6864500 (2005-03-01), Gilton
patent: 6864503 (2005-03-01), Lung
patent: 6867638 (2005-03-01), Saiki et al.
patent: 6888750 (2005-05-01), Walker et al.
patent: 6894305 (2005-05-01), Yi et al.
patent: 6903362 (2005-06-01), Wyeth et al.
patent: 6909107 (2005-06-01), Rodgers et al.
patent: 6927410 (2005-08-01), Chen
patent: 6933516 (2005-08-01), Xu
patent: 6936840 (2005-08-01), Sun et al.
patent: 6937507 (2005-08-01), Chen
patent: 6937637 (2005-08-01), Thornton et al.
patent: 6972430 (2005-12-01), Casagrande et al.
patent: 6992932 (2006-01-01), Cohen
patent: 7023009 (2006-04-01), Kostylev et al.
patent: 7033856 (2006-04-01), Lung et al.
patent: 7042001 (2006-05-01), Kim et al.
patent: 7067864 (2006-06-01), Nishida et al.
patent: 7067865 (2006-06-01), Lung et al.
patent: 7122281 (2006-10-01), Pierrat
patent: 7126149 (2006-10-01), Iwasaki et al.
patent: 7132675 (2006-11-01), Gilton
patent: 7166533 (2007-01-01), Happ
patent: 7214958 (2007-05-01), Happ
patent: 7220983 (2007-05-01), Lung
patent: 7238994 (2007-07-01), Chen et al.
patent: 7251152 (2007-07-01), Roehr
patent: 7277317 (2007-10-01), Le Phan et al.
patent: 7321130 (2008-01-01), Lung et al.
patent: 2001/0055838 (2001-12-01), Walker et al.
patent: 2002/0081833 (2002-06-01), Li et al.
patent: 2004/0051094 (2004-03-01), Ooishi
patent: 2004/0248339 (2004-12-01), Lung
patent: 2005/0029502 (2005-02-01), Hudgens
patent: 2005/0093022 (2005-05-01), Lung
patent: 2005/0201182 (2005-09-01), Osada et al.
patent: 2005/0212024 (2005-09-01), Happ
patent: 2005/0215009 (2005-09-01), Cho
patent: 2006/0043617 (2006-03-01), Abbott
patent: 2006/0108667 (2006-05-01), Lung
patent: 2006/0110878 (2006-05-01), Lung et al.
patent: 2006/0118913 (2006-06-01), Yi et al.
patent: 2006/0154185 (2006-07-01), Ho et al.
patent: 2006/0175599 (2006-08-01), Happ
patent: 2006/0234138 (2006-10-01), Fehlhaber et al.
patent: 2006/0284157 (2006-12-01), Chen et al.
patent: 2006/0284158 (2006-12-01), Lung et al.
patent: 2006/0284214 (2006-12-01), Chen
patent: 2006/0284279 (2006-12-01), Lung et al.
patent: 2006/0286709 (2006-12-01), Lung et al.
patent: 2006/0286743 (2006-12-01), Lung et al.
patent: 2007/0030721 (2007-02-01), Segal et al.
patent: 2007/0108077 (2007-05-01), Lung et al.
patent: 2007/0108429 (2007-05-01), Lung
patent: 2007/0108430 (2007-05-01), Lung
patent: 2007/0108431 (2007-05-01), Chen et al.
patent: 2007/0109836 (2007-05-01), Lung
patent: 2007/0109843 (2007-05-01), Lung et al.
patent: 2007/0111429 (2007-05-01), Lung
patent: 2007/0115794 (2007-05-01), Lung
patent: 2007/0117315 (2007-05-01), Lai et al.
patent: 2007/0121363 (2007-05-01), Lung
patent: 2007/0121374 (2007-05-01), Lung et al.
patent: 2007/0126040 (2007-06-01), Lung
patent: 2007/0131922 (2007-06-01), Lung
patent: 2007/0131980 (2007-06-01), Lung
patent: 2007/0138458 (2007-06-01), Lung
patent: 2007/0147105 (2007-06-01), Lung et al.
patent: 2007/0154847 (2007-07-01), Chen et al.
patent: 2007/0155172 (2007-07-01), Lai et al.
patent: 2007/0158632 (2007-07-01), Ho
patent: 2007/0158633 (2007-07-01), Lai et al.
patent: 2007/0158645 (2007-07-01), Lung
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