Ohmic electrode structure of nitride semiconductor device

Details Ohmic electrode structure of nitride semiconductor device Ohmic electrode structure of nitride semiconductor device

2005-02-28

2008-12-02

Ngo, Ngan (Department: 2893)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S751000, C257S763000, C257S764000, C257S770000, C257SE23041

Reexamination Certificate

active

07459788

ABSTRACT:
An ohmic electrode structure of a nitride semiconductor device having a nitride semiconductor. The ohmic electrode structure is provided with a first metal film formed on the nitride semiconductor and a second metal film formed on the first metal film. The first metal film is composed of at least one material selected from a group consisting of V, Mo, Ti, Nb, W, Fe, Hf, Re, Ta and Zr. The second metal film is composed of at least one material different from that of the first metal film (102), selected from a group consisting of V, Mo, Ti, Nb, W, Fe, Hf, Re, Ta, Zr, Pt and Au.

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