Porogen material

Details Porogen material Porogen material

2002-11-21

2008-11-25

Ngo, Ngan (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Including semiconductor material other than silicon or...

C257SE29139

Reexamination Certificate

active

07456488

ABSTRACT:
A porogen material for forming a dielectric porous film. The porogen material may include a silicon based dielectric precursor and a silicon containing porogen. The porous film may have a substantially uniform dielectric constant value throughout. Methods of forming the porous film as well as semiconductor devices employing circuit features isolated by the porous film are also present.

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