Self-aligned integrated electronic devices

Details Self-aligned integrated electronic devices Self-aligned integrated electronic devices

2003-11-14

2008-12-23

Smith, Bradley K (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257SE21209, C257S499000

Reexamination Certificate

active

07468535

ABSTRACT:
A process for self-aligned manufacturing of integrated electronic devices includes: forming, in a semiconductor wafer having a substrate, insulation structures that delimit active areas and project from the substrate; forming a first conductive layer, which coats the insulation structures and the active areas; and partially removing the first conductive layer. In addition, recesses are formed in the insulation structures before forming said first conductive layer.

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