Micro mirror unit and method of making the same

Details Micro mirror unit and method of making the same Micro mirror unit and method of making the same

2006-10-30

2008-12-02

Nguyen, Tuan H (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S717000

Reexamination Certificate

active

07459331

ABSTRACT:
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

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