Micro optical bench structure

Details Micro optical bench structure Micro optical bench structure

2005-01-13

2008-11-25

Le, Dung A. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

In combination with or also constituting light responsive...

C257S081000, C257S080000, C257S079000, C257SE33061, C438S022000, C438S024000

Reexamination Certificate

active

07456434

ABSTRACT:
A micro optical bench structure and a method of manufacturing a micro optical bench structure are provided. The micro optical bench structure includes: a lower substrate; an upper substrate which is bonded to the lower substrate, and has a through-hole for exposing the lower substrate; and a first optical device which is installed at the lower substrate, and units relating to the first optical device.

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H. Ishiguro et al., “A Laser-Detector-Hologram Unit With IV Amplifiers and Built-In Micro-Mirror”, IEEE International Solid State Circuits Conference, IEEE Service, New York, NY, US, vol. 39, Feb. 1996, pp. 330-331, 468, XP000685647, ISSN: 0193-6530, figure 1.

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