Sensor device for non-intrusive diagnosis of a semiconductor...

Details Sensor device for non-intrusive diagnosis of a semiconductor... Sensor device for non-intrusive diagnosis of a semiconductor...

2006-06-29

2008-10-14

Noland, Thomas P (Department: 2856)

Measuring and testing

Testing of apparatus

Reexamination Certificate

active

07434485

ABSTRACT:
A battery powered sensing device for diagnosing a processing system and method for using the same are provided. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.

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