Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

Filed on

2006-04-05

Date issued

2008-10-28

Examiner

Berman, Jack I. (Department: 2881)

Patent Class

Radiant energy

SubClass

Inspection of solids or liquids by charged particles

SubSubClass

Electron probe type

Other Related Categories

C250S307000, C250S306000, C250S311000, C250S3960ML, C250S3960ML

Type

Reexamination Certificate

Status

active

Patent number

07442929

Description

ABSTRACT:
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of convergence lenses is changed by changing the convergence lenses and the hole diameter of a diaphragm. The angle α of aperture of the electron beam is changed in accordance with the visual field range corresponding to a single pixel, i.e. what is called the pixel size.

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Sato, et al. “Evaluation of depth of field in SEM images ni terms of the information-passing capacity (IPC) and contrast gradient in SEM image” Nuclear Instruments and Methods in Physics Research A 519 (2004) 280-285.
Walden “Analog-to-digital converter survey and analysis” IEEE Journal on Selected Areas in Communications, vol. 17 No. 4 Apr. 1999.
Evaluation of depth of field in SEM images in terms of the information-passing capacity (IPC) and contrast gradient in SEM image, Nuclear Instruments and Methods in Physics Research A 519 (2004) 280-285.

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