Plasma generation apparatus

Details Plasma generation apparatus Plasma generation apparatus

2006-02-16

2008-08-12

Van, Quang T (Department: 3742)

Electric heating

Metal heating

By arc

C219S121360, C118S7230IR, C156S345350

Reexamination Certificate

active

07411148

ABSTRACT:
A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supplier supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, including: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.

REFERENCES:
patent: 5290382 (1994-03-01), Zarowin et al.
patent: 5435881 (1995-07-01), Ogle
patent: 5998933 (1999-12-01), Shun'ko
patent: 6150628 (2000-11-01), Smith et al.
patent: 6392351 (2002-05-01), Shun'ko
patent: 6418874 (2002-07-01), Cox et al.
patent: 6634313 (2003-10-01), Hanawa et al.
patent: 6755150 (2004-06-01), Lai et al.
patent: 6855906 (2005-02-01), Brailove
patent: 2003/0015965 (2003-01-01), Godyak

Affiliated with

Also associated with

Rating

Plasma generation apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Plasma generation apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plasma generation apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4012484