Measuring and testing – Gas analysis
Reexamination Certificate
2004-12-01
2008-10-07
Larkin, Daniel S (Department: 2856)
Measuring and testing
Gas analysis
C073S028010, C073S028040, C073S031020, C073S031030, C073S031050
Reexamination Certificate
active
07430893
ABSTRACT:
The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.
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Belanger Frank Vincent
Goodwin William
Grayfer Anatoly
Lobert Jürgen Michael
Phelps Mark C.
Entegris, Inc.
Hamilton Brook Smith & Reynolds P.C.
Larkin Daniel S
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