Scanning electron microscope and CD measurement calibration...

Details Scanning electron microscope and CD measurement calibration... Scanning electron microscope and CD measurement calibration...

2007-09-24

2008-09-02

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S252100

Reexamination Certificate

active

07420168

ABSTRACT:
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.

REFERENCES:
patent: 6919577 (2005-07-01), Watanabe et al.
patent: 7078691 (2006-07-01), Nakayama
patent: 7329889 (2008-02-01), Watanabe et al.
patent: 2005/0184234 (2005-08-01), Nakayama
patent: 2006/0289756 (2006-12-01), Nakayama
patent: 7-71947 (1995-03-01), None
patent: 08-31363 (1996-02-01), None
patent: 2003-279321 (2003-10-01), None

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